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M. Robinson, Simple resonating microstructures for gas pressure measurement, J. Micromech. , Vol. 12: pp. 204–210, 2002. 47. S. Kurth, K. Hiller, N. Zichner, J. Mehner, T. Iwert, S. Biehl, W. Dotzel and T. Gessner, A micromachined pressure gauge for the vacuum range based on damping of a resonator, Proc. SPIE Vol. 4559: pp. 103–111, 2001. 13 48. K. E. Wojciechowski, B. E. Boser and A. P. Pisano, A MEMS resonant strain sensor, Proc. Seventeenth IEEE Annual International Conference on Micro Electro Mechanical Systems, Maastrict, Netherlands: pp.

J. M. Ziman, Electrons and Phonons, Oxford University Press, 1960. 28. Physical acoustics, W. Mason, Vol. 3B, Academic Press, 1965. 29. A. Bhatia, Ultrasonic absorption, Dover Publications, 1986. 30. T. V. Roszhart, The effect of thermoelastic internal friction on the Q of micromachined silicon resonators, Proc. IEEE Solid State Sensor and Actuator Workshop: pp. 13–16, June 4–7, 1990. 31. Modification of the double ended tuning fork geometry for reduced coupling to its surroundings: finite element analysis and experiments, L.

Lin, Y. Xie, Z. Ren and C. -C. Nguyen, Micromechanical “hollow-disk” ring resonators, Proc. Seventeenth IEEE Annual International Conference on Micro Electro Mechanical Systems, Maastrict, Netherlands: pp. 821–824, 25-29th January 2004. S. P. BEEBY M. J.

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